Contribution
Micromachined Ultrasound Transducers
* Presenting author
Abstract:
Micromachined Ultrasound Transducers are promising candidates for high resolution ultrasound medical imaging. In particular, such transducers are very well suited for 3-D Super resolution Ultrasound Real time imaging of Erythrocytes (SURE). SURE is a new scheme for visualising the capillary network which requires very high resolution and the transducers must be able to work at frequencies around 15 MHz. To enable 3-D imaging the transducers are made as so-called row-column transducers where the transducer is addressed by rows and columns instead of using a fully populated matrix array. The transducers are fabricated using silicon-based micromachining which allows for high resolution definition of the elements in the array. Fabrication of a 512+512 array will be demonstrated as well as an overview of how such devices are designed and used.